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Title Standard No. Implemented On
General specification of ion implantation equipmentGB/T 15862-20122013-2-15
General specification of ion beam etching systemGB/T 15861-20122013-2-15
Oeneral specifications of automatic taping machine for electronic componentsSJ/T 11215-19991999-12-1
Design documents for special equipment for electronic industry-Part 6:Revision of design documentsSJ/T 211.6-19991999-12-1
Guidelines for photomask defect classification and size definitionGB/T 16880-19971998-3-1
Specification for metrology pattern cells for integrated circuit manufactureGB/T 16878-19971998-3-1
Guidelines for precision and accuracy expression for mask writing equipmentGB/T 16879-19971998-3-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Non-inductance Capacitor Winding MachinesSJ/T 31253-19941997-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Beam-forming Cathode Bracket Welding MachinesSJ/T 31211-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Inner/outer Cathode Thimble Assembly Welding MachinesSJ/T 31214-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for LM-2 Grinding MachinesSJ/T 31272-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Biaxial Panel Grinding MachinesSJ/T 31193-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Wafer SlicersSJ/T 31091-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Cathode Sleeve and Ceramic Chip Riveting MachinesSJ/T 31212-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for NC Wafer Cutting (Scribing) MachinesSJ/T 31092-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for H44015-2 8-bit Automatic Aluminum EvaporatorsSJ/T 31202-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for HB-10 Automatic Capacitor ThermocompressorsSJ/T 31276-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for TDK-8011 Double-row 32-station Glass Bulb Fluorescent Powder Precipitation MachinesSJ/T 31205-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for TS-16-23 Automatic Moorwood MachinesSJ/T 31085-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Picture Tube Glass Bulb Panel/cone PressesSJ/T 31189-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for EVP-13480 Magnetron Sputtering MachinesSJ/T 31273-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Button Stem Moulding MachinesSJ/T 31208-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Stabilization Treatment FurnacesSJ/T 31188-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Pulverizing MillsSJ/T 31136-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Cleaver Grinding UnitsSJ/T 31095-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for ISM-14 Wafer Cutting MachinesSJ/T 31271-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Welding MachinesSJ/T 31134-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for P44150 ExhaustersSJ/T 31200-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for (Barium) Alloy Melting FurnacesSJ/T 31137-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Mask Alignment and Exposure SystemsSJ/T 31119-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Tunnel Capacitor Cleaning MachinesSJ/T 31280-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Tube Neck Sealing MachinesSJ/T 31195-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Type 650 BlendersSJ/T 31194-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for WLD-T1 Automatic Non-inductance Capacitor Lead Wire Welding MachinesSJ/T 31279-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for MTD-2000 Resistor Balancing MachineSJ/T 31270-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Button Stem Cutting and Shaping MachinesSJ/T 31209-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for LH Fluid Edging MachinesSJ/T 31098-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Low Melting Point Glass Sintering FurnacesSJ/T 31187-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Chip MountersSJ/T 31101-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Buffing MachineSJ/T 31055-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Large Vacuum Impregnating Devices for CapacitorsSJ/T 31231-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Cathode Disc Welding MachinesSJ/T 31210-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for L78450 Roasting FurnacesSJ/T 31199-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for CY-2 Capacitor Clamp Butt-welding MachinesSJ/T 31278-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for L3080-1/YN 34-station Drying MachinesSJ/T 31204-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for P417 21-station Sealing MachinesSJ/T 31201-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Picture Tube Glass Bulb Panel/cone Hydraulic Feeding MachinesSJ/T 31190-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for 10-station Anode Cap Sealing MachinesSJ/T 31197-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Glass Bulb Cleaning MachinesSJ/T 31206-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Silver Plating MachinesSJ/T 31274-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for 6-CTVH-B Cutting MachinesSJ/T 31090-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Glass Bulb Annealing FurnacesSJ/T 31198-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for YRP10-3 Semi-auto ThermocompressorsSJ/T 31275-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Rumbling BarrelsSJ/T 31054-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Electrical Sealing MachinesSJ/T 31192-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Shadow Mask Blackening FurnacesSJ/T 31186-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for KH4682-5 Bar Shear Punching MachinesSJ/T 31089-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for TDH-4C4TO Edging MachinesSJ/T 31097-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Medium Speed Automatic Glass Tube Drawing MachinesSJ/T 31133-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for AD01 Coating MachinesSJ/T 31257-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for JZ0281 Glass Bulb Cone Nubbin Cut Off MachinesSJ/T 31191-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Near Infrared Thick-film Sintering FurnacesSJ/T 31128-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Lead Wire MakersSJ/T 31207-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Cathode Tailband Welding MachinesSJ/T 31213-19941997-1-1
Requirements of Readiness and Methods of Inspection and Assessment for Chamfering MachinesSJ/T 31099-19941997-1-1
Directives for drafting semiconductor facilities interface specificationGB/T 15873-19951996-8-1
Chrome thin films for hard surface photomasksGB/T 15870-19951996-8-1
Hard surface photomask substratesGB/T 15871-19951996-8-1
General specification for probe testerGB/T 15394-19941995-8-1
Components of injection mould for plastics Shoulder guide pillarsSJ/T 10519.08-19941994-10-1
Components of injection mould for plastics Stop guide pillarsSJ/T 10519.06-19941994-10-1
Components of injection mould for plastics Ejector retainer or plateSJ/T 10519.03-19941994-10-1
Components of injection mould for plastics Straight guide bushesSJ/T 10519.07-19941994-10-1
Components of injection mould for plastics Guide bushes for spacerSJ/T 10519.09-19941994-10-1
Components of injection mould for plastics Shoulder guide pillarsSJ/T 10519.05-19941994-10-1
Components of injection mould for plastics Mould platesSJ/T 10519.01-19941994-10-1
Components of injection mould for plastics Guide pillars with headSJ/T 10519.04-19941994-10-1
Components of injection mould for plastics SpacerSJ/T 10519.02-19941994-10-1
Requirements of Readiness and Methods of Inspection and Assessment for 60MDV-RR Vacuum AgitatorsSJ/T 31238-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for 3TDC-1-128F Capacitor Thin-film Compound MachinesSJ/T 31286-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for LHT-120/17 Fine Wire Drawing MachinesSJ/T 31324-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Vacuum Pug MillsSJ/T 31236-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for SX400A Bunching MachinesSJ/T 31328-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Radial InsertersSJ/T 31339-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for SL63-8 Vacuum Tungsten-winding Electric Furnaces with Tantalum Electrolysis CapacitorsSJ/T 31310-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Reed Sealing MachinesSJ/T 31293-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Semi-auto Capacitor Winding MachinesSJ/T 31255-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for NPW-4PT Vacuum Phenol Aldehyde Coating MachinesSJ/T 31282-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Air Capacitor Tunnel Drying MachinesSJ/T 31290-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for STELLA Automatic Capacitor Winding MachinesSJ/T 31252-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for 2T-260 Vertical Intertwist MachinesSJ/T 31326-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Component and Element InsertersSJ/T 31340-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for CF-161 Loudspeaker Assembly LinesSJ/T 31297-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Type 168 Monolithic Capacitor Printing Fin SelectorsSJ/T 31246-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for CHJ-S-2 Ultrasonic Plastics Welding MachinesSJ/T 31291-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Ceramic-lined Ball GrindersSJ/T 31241-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Double Head Loudspeaker Cone Pulp Dredging MachinesSJ/T 31299-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Tubular Wire-stranding MachinesSJ/T 31327-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for NOVA Automatic Capacitor Winding MachinesSJ/T 31256-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Aluminum Electrolyte Capacitor Winding MachinesSJ/T 31301-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for MY-TR-028 Ceramic-substrated Sand BlastersSJ/T 31242-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for DE18 Magnetic Material MixersSJ/T 31295-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Aluminum Metallization MachinesSJ/T 31247-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for 0.1-cubic-meter Vacuum AgitatorsSJ/T 31237-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for FA-17CS Ceramic Filter Assembly MachinesSJ/T 31243-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Centrifugal Spray GranulatorsSJ/T 31239-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Glass Metal AgitatorsSJ/T 31227-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Aluminum Electrolysis Capacitor Lead Wire Flattening/trimming MachinesSJ/T 31309-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Aluminum Electrolysis Capacitor Aging Test and Sorting MachinesSJ/T 31306-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Single Screw Plastic ExtrudersSJ/T 31329-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Aluminum Electrolysis Capacitor Braiding MachinesSJ/T 31311-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Thermistor CapacitorsSJ/T 31244-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Capacitor Printing MachinesSJ/T 31285-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Aluminum Electrolysis Capacitor Riveting MachineSJ/T 31302-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for 40-81 Curling MachinesSJ/T 31251-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for CLS-37 Laser TrimmersSJ/T 31248-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for TEC-L-W-1 Capacitor Braiding MachinesSJ/T 31284-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for CY Capacitor Clamp Moulding MachinesSJ/T 31277-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Capacitor Powder BlowersSJ/T 31288-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for LCC Automatic Paper Cone Moulding MachinesSJ/T 31298-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for CQ-1K Ultrasonic Cleaning MachinesSJ/T 31292-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for B512/ZF 24N and J8016 16N High-speed Wire Braiding MachinesSJ/T 31330-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for TS Plastic Envelope MachinesSJ/T 31283-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Aluminum Electrolysis Capacitor Sorting MachinesSJ/T 31305-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for 3TVC-128F-TY Capacitor Thin-film Cleaning MachinesSJ/T 31287-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Aluminum Electrolysis Capacitor Assembly MachinesSJ/T 31300-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for SD15F Spray DryersSJ/T 31240-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Aluminum Electrolysis Capacitor Aluminum Foil Energizing MachinesSJ/T 31307-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Sand Blaster TrimmersSJ/T 31249-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for TCS-810-P1A Capacitor-driven SortersSJ/T 31245-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Aluminum Electrolysis Capacitor Lead Wire Butt-welding MachinesSJ/T 31308-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Continuous Drawing Machines for the Aluminum Cases of Aluminum Electrolysis CapacitorsSJ/T 31304-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for MD-12D-C Magnetic Material Thread Grinding MachinesSJ/T 31294-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Annular Wire Crest WeldersSJ/T 31333-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Potentiometer Soldering Lug Riveting MachinesSJ/T 31250-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Small/medium Wire Drawing MachinesSJ/T 31325-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for 500A Automatic Winding MachinesSJ/T 31289-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Aluminum Electrolysis Capacitor Aluminum Foil Etching MachinesSJ/T 31303-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Tinned Copper Wire Winding MachinesSJ/T 31281-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for J70500 Aluminum Electrolysis Capacitor Paper/foil Cutting MachinesSJ/T 31312-19941994-6-1
Requirements of Readiness and Methods of Inspection and Assessment for Automatic Fin Winding MachinesSJ/T 31254-19941994-6-1
Components of injection mould for plastics Shouldered ejector pinsSJ/T 10519.12-19971994-1-10
Wafer carriersGB/T 13840-19921993-8-1
Vacuum resistance furnace - Basic parameters seriesSJ 861-19741974-10-1
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