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| Chinese National Standard Category: Electronic industry production equipment in general |
| English Title: | Terminology for integrated circuit(IC) manufacturing equipment |
| Chinese Title: | 集成电路制造设备术语 |
| Standard No.: | GB/T 40577-2021 |
| Category No.: | L95 |
| Issued by: | SAMR; SAC |
| Issued on: | 2021-10-11 |
| Implemented on: | 2022-5-1 |
| Status: | valid |
| Superseded by: | |
| Superseded on: | |
| Abolished on: | |
| Superseding: | |
| Word Count: | 25000 words |
| Similar Standards: | GB/T 41213-2021 GB/T 40577-2021 GB/T 29845-2013 GB/T 30116-2013 GB/T 16524-1996 |
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