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| GB/T 14139-2009 Silicon epitaxial wafers (English Version) |
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Detail of GB/T 14139-2009
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Introduction of GB/T 14139-2009
本标准规定了硅外延片的产品分类、技术要求、试验方法和检验规则及标志、包装运输、贮存等。
本标准适用于在Ｎ 型硅抛光片衬底上生长的ｎ型外延层（Ｎ／Ｎ＋ ）和在ｐ型硅抛光片衬底上生长的Ｐ型外延层（Ｐ／Ｐ＋ ）的同质硅外延片。产品主要用于制作硅半导体器件。其他类型的硅外延片可参照使用。
Contents of GB/T 14139-2009