Standard No.:	GB/T 14139-2009
English Name:	Silicon epitaxial wafers
Chinese Name:	硅外延片
Chinese Classification:	H80    Semimetal and semiconductor material in general
Professional Classification:	GB    National Standard
ICS Classification:	29.045 29.045    Semiconducting materials 29.045
Issued by:	AQSIQ; SAC
Issued on:	2009-10-30
Implemented on:	2010-6-1
Status:	abolished
Superseded by:	GB/T 14139-2019 Silicon epitaxial wafers
Superseded on:	2020-5-1
Abolished on:	2020-05-01
Superseding:	GB/T 14139-1993 Silicon epitaxial wafers
Language:	English
File Format:	PDF
Word Count:	6000 words
Price(USD):	180.00
Delivery:	via email in 1~3 business day

本标准规定了硅外延片的产品分类、技术要求、试验方法和检验规则及标志、包装运输、贮存等。
本标准适用于在Ｎ 型硅抛光片衬底上生长的ｎ型外延层（Ｎ／Ｎ＋ ）和在ｐ型硅抛光片衬底上生长的Ｐ型外延层（Ｐ／Ｐ＋ ）的同质硅外延片。产品主要用于制作硅半导体器件。其他类型的硅外延片可参照使用。