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| Position: Chinese Standard in English/GB/T 6616-2009 |
| GB/T 6616-2009 Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge (English Version) | |||
| Standard No.: | GB/T 6616-2009 | Status: | superseded remind me the status change |
| Language: | English | File Format: | |
| Word Count: | 6000 words | Price(USD): | 150.0 remind me the price change |
| Implemented on: | 2010-6-1 | Delivery: | via email in 1~3 business day |
| Standard No.: | GB/T 6616-2009 |
| English Name: | Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge |
| Chinese Name: | 半导体硅片电阻率及硅薄膜薄层电阻测试方法 非接触涡流法 |
| Chinese Classification: | H80 Semimetal and semiconductor material in general |
| Professional Classification: | GB National Standard |
| ICS Classification: | 29.045 Semiconducting materials |
| Issued by: | AQSIQ; SAC |
| Issued on: | 2009-10-30 |
| Implemented on: | 2010-6-1 |
| Status: | superseded |
| Superseded by: | GB/T 6616-2023 Test method for resistivity of semiconductor wafers and sheet resistance of semiconductor films—Noncontact eddy-current gauge |
| Superseded on: | 2024-3-1 |
| Superseding: | GB/T 6616-1995 Test method for measuring resistivity of semiconductor silicon or sheet resistance of semiconductor films with a noncontact eddy-current gage |
| Language: | English |
| File Format: | |
| Word Count: | 6000 words |
| Price(USD): | 150.0 |
| Delivery: | via email in 1~3 business day |