Standard No.:	YS/T 985-2014
English Name:	Polished reclaimed silicon wafers
Chinese Name:	硅抛光回收片
Chinese Classification:	H80    Semimetal and semiconductor material in general
Professional Classification:	YS    Professional Standard - Non-ferrous Metal
ICS Classification:	29.045 29.045    Semiconducting materials 29.045
Issued by:	MIIT
Issued on:	2014-10-14
Implemented on:	2015-4-1
Status:	valid
Language:	English
File Format:	PDF
Word Count:	7500 words
Price(USD):	220.0
Delivery:	via email in 1~3 business day

本标准规定了硅抛光回收片的要求、检验方法、检验规则、标志、包装、运输、储存、质量证明书和订货单（或合同）内容。
本标准适用于用户提供的或来源于第三方的硅回收片（主要包括100mm、125mm、150mm和200mm单面或双面抛光硅片、未抛光硅片或外延硅片）经单面抛光制备的硅抛光片。产品主要用于机械、炉处理、颗粒和光刻中的监控片。