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Chinese National Standard Category: Optical equipment |
English Title: | General specification of mask alignment and exposure system |
Chinese Title: | 掩模对准曝光机通用技术条件 |
Standard No.: | GB 11481-1989 |
Category No.: | N38 |
Issued by: | |
Issued on: | |
Implemented on: | 1990-3-1 |
Status: | superseded |
Superseded by: | SJ/T 11079-1996 General specification for mask alignment and exposure system |
Superseded on: | 1997-1-1 |
Abolished on: | |
Superseding: | |
Word Count: | 5500 words |
Similar Standards: | GB/Z 43082-2023 GB/T 35437-2017 JB/T 10677-2006 GB/T 20244-2006 JB/T 10556-2006 GB 11481-1989 ZB N 38001-1988 |
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