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| Chinese National Standard Category: Metal physical property test method |
| English Title: | Test method for measuring resistivity of silicon wafers using spreading resistance probe |
| Chinese Title: | 硅片电阻率测定 扩展电阻探针法 |
| Standard No.: | GB/T 6617-1995 |
| Category No.: | H21 |
| Issued by: | SBTS |
| Issued on: | 1995-04-18 |
| Implemented on: | 1995-1-2 |
| Status: | superseded |
| Superseded by: | GB/T 6617-2009 Test method for measuring resistivity of silicon wafer using spreading resistance probe |
| Superseded on: | 2010-6-1 |
| Abolished on: | |
| Superseding: | GB 6617-1986 Standard method for measuring resistivity of silicon wafers using spreading resistance probe |
| Word Count: | 3500 words |
| Similar Standards: | GB/T 6618-1995 GB/T 8364-2003 GB/T 6522-1986 GB/T 4108-2004 GB/T 6608-1999 GB 1552-1979 GB/T 21115-2007 GB/T 4107-2004 GB 5251-1985 GB/T 3248-1982 GB/T 43315-2023 GB/T 43313-2023 GB/T 43096-2023 GB/T 43092-2023 GB/T 23365-2023 GB/T 43093-2023 GB/T 42902-2023 GB/T 1555-2023 GB/T 42676-2023 GB/T 42905-2023 |
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