Standard No.:	DB32/T 4378-2022
English Name:	Nano,sub-micron scale film on substrate-Non-destructive test method of sheet resistance-Four probe method
Chinese Name:	衬底表面纳米、亚微米尺度薄膜 方块电阻的无损测试 四探针法
Chinese Classification:	B61    Seed, seedling, seedling nursery
Professional Classification:	DB    Provincial Standard
ICS Classification:	65.020.40 65.020.40    Landscaping and silviculture 65.020.40
Source Content Issued by:	Jiangsu Adminstration of Market Regulation
Issued on:	2022-10-23
Status:	valid
Target Language:	English
File Format:	PDF

本文件规定了采用导电橡胶探头进行衬底表面纳米、亚微米尺度薄膜方块电阻四探针无损测试的方法。
本文件适用于目测平坦且表面存在纳米、亚微米尺度薄膜样品的方块电阻测定，方块电阻测试范围为1×10-4Ω~1×104Ω。