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| GB/T 14139-1993 Silicon epitaxial wafers (English Version) |
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Detail of GB/T 14139-1993
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Introduction of GB/T 14139-1993
本标准规定了硅外延片的产品分类、技术要求、试验方法和检验规则及标志、包装、运输、贮存。本标准适用于在N型硅抛光片衬底上生长的N型外延层(N/N+)和在P型硅抛光片衬底上生长的P型外延层(P/P+)的同质硅外延片。产品用于制作半导体器件。
Contents of GB/T 14139-1993