Standard No.:	GB/T 16594-2008
English Name:	General rules for measurement of length in micron scale by SEM
Chinese Name:	微米级长度的扫描电镜测量方法通则
Chinese Classification:	N53    Electrochemical, thermochemistry and optical profile type analyzer
Professional Classification:	GB    National Standard
ICS Classification:	71.040.99 71.040.99    Other standards related to analytical chemistry 71.040.99
Issued by:	AQSIQ SAC
Issued on:	2008-9-18
Implemented on:	2009-5-1
Status:	valid
Superseding:	GB/T 16594-1996 Micron grade lenght measurement by SEM
Language:	English
File Format:	PDF
Word Count:	8000 words
Price(USD):	240.0
Delivery:	via email in 1~3 business day

本标准代替GB/T 16594-1996《微米级长度的扫描电镜测量方法》。
本标准规定了微米级长度的扫描电镜测量方法的通用原则。
本标准与GB/T 16594-1996相比主要变化如下：
———将“测量方法”改为“测量方法通则”；
———将“误差分析”改为“不确定度评定”；
———增加样品变形产生的不确定度评定；
———改用实验方法获取图像测量的瞄准不确定度量值；
———增加“被测长度方向的调整”附录。