Standard No.:	GB/T 21287-2007
English Name:	Gases for electronic industry—Nitrogen trifluoride
Chinese Name:	电子工业用气体三氟化氮
Chinese Classification:	G86    Industrial gas and chemical gas
Professional Classification:	GB    National Standard
ICS Classification:	71.100.20 71.100.20    Gases for industrial application 71.100.20
Issued by:	AQSIQ; SAC
Issued on:	2007-12-14
Implemented on:	2008-7-1
Status:	superseded
Superseded by:	GB/T 21287-2021 Electronic specialty gas—Nitrogen trifluoride
Superseded on:	2022-5-1
Language:	English
File Format:	PDF
Word Count:	10000 words
Price(USD):	300.00
Delivery:	via email in 1~3 business day

本标准规定了瓶装电子工业用气体---三氟化氮的技术要求、试验方法、检验规则及包装、标志、运输、储存和安全。
本标准适用于电子工业用三氟化氮。它主要用作电子工业中等离子体工艺等离子体刻蚀剂和化学气相沉积的清洗剂。