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Standard
| GB/T 45826-2025 Titania doped silica glass for lithography (English Version) |
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Detail of GB/T 45826-2025
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Introduction of GB/T 45826-2025
本文件规定了光刻用掺钛石英玻璃（以下简称掺钛石英玻璃）的要求、检验规则以及标志、包装、运输和贮存，描述了相应的试验方法。
本文件适用于半导体集成电路光刻反射光学系统用掺钛石英玻璃的生产、检验、交付和验收。
Contents of GB/T 45826-2025