Standard No.:	JB/T 8945-2010
English Name:	Vacuum sputtering coating plant
Chinese Name:	真空溅射镀膜设备
Chinese Classification:	J78    Vacuum technique and equipment
Professional Classification:	JB    Professional Standard - Machinery
Issued by:	State Economic and Trade Commission
Issued on:	2010-2-11
Implemented on:	2010-7-1
Status:	valid
Superseding:	JB/T 8945-1999 Vacuum sputtering coating plant
Language:	English
File Format:	PDF
Word Count:	3000 words
Price(USD):	90.00
Delivery:	via email in 1~3 business day

本标准规定了真空溅射镀膜设备的基本参数、技术要求、试验方法、检验规则、标志、包装、运输和贮存等。
本标准适用于压力在1×10-1Pa～1×10-3Pa范围的真空溅射镀膜设备。