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| SJ/T 11493-2015 Test method for measuring nitrogen concentration in silicon substrates by secondary ion mass spectrometry (English Version) |
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Detail of SJ/T 11493-2015
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Introduction of SJ/T 11493-2015
本标准规定了用二次离子质谱法（SIMS）对硅衬底单晶体材料中氮总浓度的测试方法。
Contents of SJ/T 11493-2015