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Standard
| SJ/T 11503-2015 Test methods for measuring surface roughness of polished monocrystalline silicon carbide wafers (English Version) |
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Detail of SJ/T 11503-2015
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Introduction of SJ/T 11503-2015
本标准规定了用表面轮廓仪和原子力显微镜测定碳化硅单晶抛光片表面粗糙度的方法。
Contents of SJ/T 11503-2015