Standard No.:	T/CASME 1953-2025
English Name:	Perfluoro ether rubber sealing products for semiconductor equipment
Chinese Name:	半导体设备用全氟醚橡胶密封制品
Chinese Classification:	G43    Rubber seal
Professional Classification:	T/    Social Organization Standard
ICS Classification:	83.140.50 83.140.50    Seals 83.140.50
Source Content Issued by:	CASME
Issued on:	2025-03-21
Implemented on:	2025-4-21
Status:	valid
Target Language:	English
File Format:	PDF

本文件规定了半导体设备用全氟醚橡胶密封制品的分类、技术要求、试验方法、检验规则、标志、标签和随行文件、包装、运输和贮存。
本文件适用于工作温度范围为-45℃～320℃的半导体设备用全氟醚橡胶密封制品的制造、检验。