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Introduction of T/CEMIA 043-2024
本文件规定了集成电路扩散设备用石英外管的术语和定义、分类和标记、材料、要求、试验方法、检验规则以及标志、包装、运输和贮存。
本文件适用于集成电路制造工艺用12英寸及以下的集成电路扩散设备用石英外管产品。
Contents of T/CEMIA 043-2024