Standard No.:	T/CEMIA 043-2024
English Name:	Quartz outer tubes for integrated circuit diffusion equipment
Chinese Name:	集成电路扩散设备用石英外管
Chinese Classification:	Q35    Quartz glass
Professional Classification:	T/    Social Organization Standard
ICS Classification:	81.040.30 81.040.30    Glass products 81.040.30
Issued by:	CEMIA
Issued on:	2024-11-05
Implemented on:	2025-1-15
Status:	valid
Language:	English
File Format:	PDF

本文件规定了集成电路扩散设备用石英外管的术语和定义、分类和标记、材料、要求、试验方法、检验规则以及标志、包装、运输和贮存。
本文件适用于集成电路制造工艺用12英寸及以下的集成电路扩散设备用石英外管产品。