Standard No.:	T/ICMTIA SM006-2021
Chinese Name:	集成电路线宽65nm～14nm逻辑工艺用300mm P/P-型硅外延片
Professional Classification:	T/    Social Organization Standard
Source Content Issued by:	ICMTIA
Issued on:	2021-05-31
Implemented on:	2021-7-30
Status:	valid
Target Language:	English
File Format:	PDF

本文件规定了直径300mm、P/P-型、(100)晶向规格的硅外延片的技术要求、试验方法、检验规则以及标志、包装、运输、贮存、质量证明书。
本文件适用于集成电路线宽65nm-14nm逻辑工艺用300mmP/P-型硅外延片。