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Detail of T/ICMTIA TG0011-2022
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Introduction of T/ICMTIA TG0011-2022
本文件规定了集成电路用高纯铝及铝合金溅射靶材的技术要求，检测方法，包装与运输及安全的要求。
本文件适用于集成电路制造用的高纯铝及铝合金靶材。
Contents of T/ICMTIA TG0011-2022