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| YS/T 987-2021 (English Version) |
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Detail of YS/T 987-2021
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Introduction of YS/T 987-2021
本文件规定了气相色谱质谱联用法测定氯硅烷中碳杂质含量的方法。
本文件适用于氯硅烷中碳杂质（包括氯硅烷中的甲基二氯硅烷、甲基三氯硅烷、二甲基一氯硅烷、二甲基二氯硅烷、三甲基一氯硅烷，统称甲基氯硅烷）含量的测定，测定范围 （质量分数）为 0.000 010%～0.10%。
Contents of YS/T 987-2021