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| Standard Insuued on: 1982-02 |
SJ 2065-1982 Testing method for diffusion furnace for semiconductor device manufacturing
半导体器件生产用扩散炉测试方法
| Category No.: | SJ | Valid Status: | valid |
| Issued Organization: | MIIT | Issued Date: | 1982-02-18 |
| Implemented Date: | 1982-7-1 | Abolished Date: | |
| Superseded Standard.: | Superseded Date: |
GB 2894-2008
CB* 3129-1982
SJ 2057-1982
GB 2895-1982
GB/T 2904-1982
GB/T 718-1982
SJ 2057
SJ 2065-1982
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