Chinese Classification
Professional Classification
ICS Classification
Latest
Value-added Services
|
Chinese National Standard Category: Metal physical property test method |
English Title: | Test method for resistivity of semiconductor wafers and sheet resistance of semiconductor films—Noncontact eddy-current gauge |
Chinese Title: | 半导体晶片电阻率及半导体薄膜薄层电阻的测试 非接触涡流法 |
Standard No.: | GB/T 6616-2023 |
Category No.: | H21 |
Issued by: | SAMR; SAC |
Issued on: | 2023-08-06 |
Implemented on: | 2024-3-1 |
Status: | valid |
Superseded by: | |
Superseded on: | |
Abolished on: | |
Superseding: | GB/T 6616-2009 Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge |
Word Count: | 7500 words |
Similar Standards: | GB/T 4108-2004 GB 1552-1979 GB/T 21115-2007 GB/T 4107-2004 GB 5251-1985 GB/T 3248-1982 GB/T 43315-2023 GB/T 43313-2023 GB/T 43096-2023 GB/T 43092-2023 GB/T 23365-2023 GB/T 43093-2023 GB/T 42902-2023 GB/T 1555-2023 GB/T 42676-2023 GB/T 42905-2023 GB/T 42789-2023 GB/T 42907-2023 GB/T 6616-2023 GB/T 1553-2023 |
Tel: +86-10-8572 5655 | Fax: +86-10-8581 9515 | Email: coc@codeofchina.com | QQ: 672269886 |
Copyright: Foryou Tech Co., Ltd. 2008-2020 |