Standard No.:	GB/T 20175-2025
English Name:	Surface chemical analysis—Sputter depth profiling—Optimization using layered systems as reference materials
Chinese Name:	表面化学分析 溅射深度剖析 用层状膜系为参考物质的优化方法
Chinese Classification:	G04    Basic standards and general methods
Professional Classification:	GB    National Standard
ICS Classification:	71.040.40 71.040.40    Chemical analysis 71.040.40
Source Content Issued by:	SAMR; SAC
Issued on:	2025-06-30
Implemented on:	2026-1-1
Status:	to be valid
Superseding:	GB/T 20175-2006 Surface chemical analysis-Sputter depth profiling-Optimization using layered systems as reference materials
Target Language:	English
File Format:	PDF
Word Count:	12500 words
Translation Price(USD):	375.0
Delivery:	via email in 1~5 business day

本文件提供了使用适当的单层和多层参考物质优化溅射深度分析参数的指导和要求，以便优化俄歇电子能谱、X射线光电子能谱和二次离子质谱中的仪器设置，实现最佳深度分辨。
本文件不涵盖特殊多层膜系（例如δ掺杂层）的使用。