GB/T 25915.8-2021 Cleanrooms and associated controlled environments—Part 8: Classification of air cleanliness by chemical concentration (ACC) (English)
GB/T 25915.8-2021 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)
1 Scope
This document establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.
This document currently considers only concentrations of air chemical contamination between 100 and 10−12g/m3 under cleanroom operational conditions.
This document is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.
It is not the intention of this document to describe the nature of air chemical contamination.
This document does not give a classification of surface chemical contamination.
2 Normative references
The following normative documents contain provisions which, through reference in this text, constitute provisions of this document. For dated references, only the edition cited applies. For undated references, the latest edition (including any amendments) applies.
GB/T 25915.6 Cleanrooms and associated controlled environments - Part 6: Vocabulary (GB/T 25915-2010, ISO 14644-6:2007, IDT)
Note: ISO 14644-6:2007 has been withdrawn, while China still retains the corresponding national standard that is equivalent to it.
3 Terms and definitions
For the purposes of this document, the terms and definitions given in GB/T 25915.6 and the following apply.
3.1 General
3.1.1
chemical contamination
non-particulate substances that can have a deleterious effect on the product, process or equipment
3.1.2
air cleanliness by chemical concentration; ACC
level of air cleanliness by chemical concentration, expressed in terms of an ISO-ACC Class N, which represents the maximum allowable concentration of a given chemical species or a group of chemical species, expressed in grams per cubic metre
Note: This definition does not include macromolecules of biological origin, which are judged to be particles.
3.1.3
air chemical contamination
any substance in the air that can, by its chemical nature, adversely affect the product, process or equipment
3.1.4
surface cleanliness by chemical concentration; SCC
condition of the surface cleanliness with respect to its chemical concentration
3.1.5
surface chemical contamination
any substance on the surface that can, by its chemical nature, adversely affect the product, process or equipment
3.1.6
contaminant category
common name for a group of compounds with a specific and similar deleterious effect when deposited on the surface of interest
3.1.7
outgassing
release of chemical substances in the gaseous or vapour state from a material
3.1.8
air cleanliness by chemical concentration (ACC) class
grading number stating the maximum allowable concentration of a given chemical species or a group of chemical species in grams per cubic metre
Contents
Foreword II
Introduction IV
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (Informative) Parameters for consideration
Annex B (Informative) Typical contaminants
Annex C (Informative) Typical methods of measurement
Annex D (Informative) Consideration of specific requirements for separative devices
Bibliography
GB/T 25915.8-2021 Cleanrooms and associated controlled environments—Part 8: Classification of air cleanliness by chemical concentration (ACC) (English)
Standard No.
GB/T 25915.8-2021
Status
valid
Language
English
File Format
PDF
Word Count
10500 words
Translation Price(USD)
315.0
Implemented on
2022-3-1
Delivery
via email in 1 business day
Detail of GB/T 25915.8-2021
Standard No.
GB/T 25915.8-2021
English Name
Cleanrooms and associated controlled environments—Part 8: Classification of air cleanliness by chemical concentration (ACC)
GB/T 25915.8-2021 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)
1 Scope
This document establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.
This document currently considers only concentrations of air chemical contamination between 100 and 10−12g/m3 under cleanroom operational conditions.
This document is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.
It is not the intention of this document to describe the nature of air chemical contamination.
This document does not give a classification of surface chemical contamination.
2 Normative references
The following normative documents contain provisions which, through reference in this text, constitute provisions of this document. For dated references, only the edition cited applies. For undated references, the latest edition (including any amendments) applies.
GB/T 25915.6 Cleanrooms and associated controlled environments - Part 6: Vocabulary (GB/T 25915-2010, ISO 14644-6:2007, IDT)
Note: ISO 14644-6:2007 has been withdrawn, while China still retains the corresponding national standard that is equivalent to it.
3 Terms and definitions
For the purposes of this document, the terms and definitions given in GB/T 25915.6 and the following apply.
3.1 General
3.1.1
chemical contamination
non-particulate substances that can have a deleterious effect on the product, process or equipment
3.1.2
air cleanliness by chemical concentration; ACC
level of air cleanliness by chemical concentration, expressed in terms of an ISO-ACC Class N, which represents the maximum allowable concentration of a given chemical species or a group of chemical species, expressed in grams per cubic metre
Note: This definition does not include macromolecules of biological origin, which are judged to be particles.
3.1.3
air chemical contamination
any substance in the air that can, by its chemical nature, adversely affect the product, process or equipment
3.1.4
surface cleanliness by chemical concentration; SCC
condition of the surface cleanliness with respect to its chemical concentration
3.1.5
surface chemical contamination
any substance on the surface that can, by its chemical nature, adversely affect the product, process or equipment
3.1.6
contaminant category
common name for a group of compounds with a specific and similar deleterious effect when deposited on the surface of interest
3.1.7
outgassing
release of chemical substances in the gaseous or vapour state from a material
3.1.8
air cleanliness by chemical concentration (ACC) class
grading number stating the maximum allowable concentration of a given chemical species or a group of chemical species in grams per cubic metre
Contents of GB/T 25915.8-2021
Contents
Foreword II
Introduction IV
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (Informative) Parameters for consideration
Annex B (Informative) Typical contaminants
Annex C (Informative) Typical methods of measurement
Annex D (Informative) Consideration of specific requirements for separative devices
Bibliography