Standard No.:	GB/T 42274-2022
English Name:	Determination of the content and distribution of trace elements (magnesium, gallium) in aluminum nitride materials—Secondary ion mass spectrometry
Chinese Name:	氮化铝材料中痕量元素（镁、镓）含量及分布的测定 二次离子质谱法
Chinese Classification:	H17    Semimetal and semiconductor material analysis method
Professional Classification:	GB    National Standard
Issued by:	SAMR; SAC
Issued on:	2022-12-30
Implemented on:	2023-4-1
Status:	valid
Language:	English
File Format:	PDF
Word Count:	5500 words
Price(USD):	165.00
Delivery:	via email in 1~3 business day

本文件描述了氮化铝单晶中痕量镁和镓含量及分布的二次离子质谱测试方法。
本文件适用于氮化铝单晶中痕量镁和镓含量及分布的定量测定，测定范围为镁、镓的含量均不小于1×1016 cm-3，元素含量（原子个数百分比）不大于1%。
注：氮化铝单晶中待测元素的含量以每立方厘米中的原子个数计。