Standard No.:	T/ZSA 231-2024
English Name:	Test method for full width at half maximum of double crystal X-ray rocking curve of Ga2O3 single crystal substrate
Chinese Name:	氧化镓单晶片X射线双晶摇摆曲线半高宽测试方法
Chinese Classification:	H21    Metal physical property test method
Professional Classification:	T/    Social Organization Standard
ICS Classification:	29.045 29.045    Semiconducting materials 29.045
Source Content Issued by:	Zhongguancun Standardization Association
Issued on:	2024-05-15
Implemented on:	2024-5-16
Status:	valid
Target Language:	English
File Format:	PDF

本文件描述了利用双晶X射线衍射仪测试氧化镓单晶片摇摆曲线及其半高宽的方法。
本文件适用于熔体法、液相法及气相法生长的β相氧化镓单晶片，对前述单晶片进行化学或机械抛光后的样品同样适用于此方法。