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Position: Chinese Standard in English/YS/T 23-2016
YS/T 23-2016   Test method for thickness of epitaxial layers-Stacking fault size (English Version)
Standard No.: YS/T 23-2016 Status:valid remind me the status change

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Implemented on:2016-9-1 Delivery: via email in 1~3 business day

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Standard No.: YS/T 23-2016
English Name: Test method for thickness of epitaxial layers-Stacking fault size
Chinese Name: 硅外延层厚度测定 堆垛层错尺寸法
Professional Classification: YS    Professional Standard - Non-ferrous Metal
Source Content Issued by: Ministry of Industry and Information Technology
Issued on: 2016-04-05
Implemented on: 2016-9-1
Status: valid
Superseding:YS/T 23-1992 Thickness determination for silicon epitaxial layers - Stacking fault method
Target Language: English
File Format: PDF
Word Count: 4000 words
Translation Price(USD): 120.0
Delivery: via email in 1~3 business day
本标准规定了利用堆垛层错尺寸法测量硅外延层厚度的方法。
本标准适用于在<111>、<100>和<110>晶向的硅单晶衬底上生长的2μm~120μm硅外延层厚度的测量。
Code of China
Standard
YS/T 23-2016  Test method for thickness of epitaxial layers-Stacking fault size (English Version)
Standard No.YS/T 23-2016
Statusvalid
LanguageEnglish
File FormatPDF
Word Count4000 words
Price(USD)120.0
Implemented on2016-9-1
Deliveryvia email in 1~3 business day
Detail of YS/T 23-2016
Standard No.
YS/T 23-2016
English Name
Test method for thickness of epitaxial layers-Stacking fault size
Chinese Name
硅外延层厚度测定 堆垛层错尺寸法
Chinese Classification
Professional Classification
YS
ICS Classification
Issued by
Ministry of Industry and Information Technology
Issued on
2016-04-05
Implemented on
2016-9-1
Status
valid
Superseded by
Superseded on
Abolished on
Superseding
YS/T 23-1992 Thickness determination for silicon epitaxial layers - Stacking fault method
Language
English
File Format
PDF
Word Count
4000 words
Price(USD)
120.0
Keywords
YS/T 23-2016, YS 23-2016, YST 23-2016, YS/T23-2016, YS/T 23, YS/T23, YS23-2016, YS 23, YS23, YST23-2016, YST 23, YST23
Introduction of YS/T 23-2016
本标准规定了利用堆垛层错尺寸法测量硅外延层厚度的方法。
本标准适用于在<111>、<100>和<110>晶向的硅单晶衬底上生长的2μm~120μm硅外延层厚度的测量。
Contents of YS/T 23-2016
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Keywords:
YS/T 23-2016, YS 23-2016, YST 23-2016, YS/T23-2016, YS/T 23, YS/T23, YS23-2016, YS 23, YS23, YST23-2016, YST 23, YST23