Standard No.:	GB/T 12964-2003
English Name:	Monocrystalline silicon polished wafers
Chinese Name:	硅单晶抛光片
Chinese Classification:	H82    Elemental semiconductor material
Professional Classification:	GB    National Standard
ICS Classification:	29.045 29.045    Semiconducting materials 29.045
Issued by:	AQSIQ
Issued on:	2003-6-1
Implemented on:	2004-1-1
Status:	superseded
Superseded by:	GB/T 12964-2018 Monocrystalline silicon polished wafers
Superseded on:	2019-6-1
Superseding:	GB/T 12964-1996 Monocrystalline silicon polished wafers
Language:	English
File Format:	PDF
Word Count:	5000 words
Price(USD):	150.00
Delivery:	via email in 1~3 business day

本标准规定了硅单晶抛光片的必要的相关性术语、产品分类、技术要求、试验方法、检测规则以及标志、包装、运输、贮存等。本标准适用于直拉硅单晶研磨片经腐蚀减薄后进行单面抛光制备的硅抛光片。产品主要用于制作集成电路等半导体器件或做为硅外延沉积的衬底。