GB/T 19921-2005 English Version, GB/T 19921-2005 Test method of particles on silicon wafer surfaces (English Version)

Chinese Classification Professional Classification ICS Classification Latest News Value-added Services

GB/T 19921-2005 Test method of particles on silicon wafer surfaces (English Version)
Standard No.:	GB/T 19921-2005	Status:	superseded remind me the status change Email:
Target Language:	English	File Format:	PDF
Word Count:	4000 words	Translation Price(USD):	120.0 remind me the price change Email:
Implemented on:	2006-4-1	Delivery:	via email in 1~3 business day

→

Standard No.:	GB/T 19921-2005
English Name:	Test method of particles on silicon wafer surfaces
Chinese Name:	硅抛光片表面颗粒测试方法
Chinese Classification:	H17 Semimetal and semiconductor material analysis method
Professional Classification:	GB National Standard
ICS Classification:	77.040.01 77.040.01 Testing of metals in general 77.040.01
Source Content Issued by:	AQSIQ; SAC
Issued on:	2005-9-19
Implemented on:	2006-4-1
Status:	superseded
Superseded by:	GB/T 19921-2018 Test method for particles on polished silicon wafer surfaces
Superseded on:	2019-7-1
Target Language:	English
File Format:	PDF
Word Count:	4000 words
Translation Price(USD):	120.0
Delivery:	via email in 1~3 business day

Standard

GB/T 19921-2005 Test method of particles on silicon wafer surfaces (English Version)
Standard No.	GB/T 19921-2005
Status	superseded
Language	English
File Format	PDF
Word Count	4000 words
Price(USD)	120.0
Implemented on	2006-4-1
Delivery	via email in 1~3 business day

Detail of GB/T 19921-2005

Standard No.

English Name

Chinese Name

Chinese Classification

Professional Classification

ICS Classification

Issued by

Issued on

Implemented on

Status

Superseded by

Superseded on

Abolished on

Superseding

Language

File Format

Word Count

Price(USD)

Keywords

Introduction of GB/T 19921-2005

本标准规定了应用扫描表面检查系统(SSIS)对硅抛光片表面颗粒进行测试、计数和报告的程序。本标准适用于硅抛光片，也可适用于硅外延片或其他镜面抛光片(如化合物抛光片)。本标准也适用于观测硅抛光片表面的划痕、桔皮、凹坑、波纹等缺陷，但这些缺陷的检测、分类依赖于设备的功能，并与检测时的初始设置有关。

Contents of GB/T 19921-2005

Tel: +86-10-8572 5655 \| Fax: +86-10-8581 9515 \| Email: coc@codeofchina.com \| QQ: 672269886
Copyright: Beijing COC Tech Co., Ltd. 2008-2040



Keywords:
GB/T 19921-2005, GB 19921-2005, GBT 19921-2005, GB/T19921-2005, GB/T 19921, GB/T19921, GB19921-2005, GB 19921, GB19921, GBT19921-2005, GBT 19921, GBT19921