Standard No.:	GB/T 13387-2009
English Name:	Test method for measuring flat length wafers of silicon and other electronic materials
Chinese Name:	硅及其它电子材料晶片参考面长度测量方法
Chinese Classification:	H80    Semimetal and semiconductor material in general
Professional Classification:	GB    National Standard
ICS Classification:	29.045 29.045    Semiconducting materials 29.045
Source Content Issued by:	AQSIQ; SAC
Issued on:	2009-10-30
Implemented on:	2010-6-1
Status:	valid
Superseding:	GB/T 13387-1992 Test method for measuring flat length on slices of electronic materials
Target Language:	English
File Format:	PDF
Word Count:	6000 words
Translation Price(USD):	150.0
Delivery:	via email in 1~3 business day

本标准用于标称圆形晶片边缘平直部分长度小于等于65mm 的电学材料。本标准仅对硅片精度进行确认,预期精度不因材料而改变。
本标准适用于仲裁测量,当规定的限度要求高于用尺子和肉眼检测能够获得的精度时,本标准也可用于常规验收测量。