GB/T 6618-2009 English Version, GB/T 6618-2009 Test method for thickness and total thickness variation of silicon slices (English Version)

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Position: Chinese Standard in English/GB/T 6618-2009

GB/T 6618-2009 Test method for thickness and total thickness variation of silicon slices (English Version)
Standard No.:	GB/T 6618-2009	Status:	valid remind me the status change Email:
Target Language:	English	File Format:	PDF
Word Count:	6000 words	Translation Price(USD):	180.0 remind me the price change Email:
Implemented on:	2010-6-1	Delivery:	via email in 1~3 business day

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Standard No.:	GB/T 6618-2009
English Name:	Test method for thickness and total thickness variation of silicon slices
Chinese Name:	硅片厚度和总厚度变化测试方法
Chinese Classification:	H80 Semimetal and semiconductor material in general
Professional Classification:	GB National Standard
ICS Classification:	29.045 29.045 Semiconducting materials 29.045
Source Content Issued by:	AQSIQ; SAC
Issued on:	2009-10-30
Implemented on:	2010-6-1
Status:	valid
Superseding:	GB/T 6618-1995 Test method for thickness and total thickness variation of silicon slices
Target Language:	English
File Format:	PDF
Word Count:	6000 words
Translation Price(USD):	180.0
Delivery:	via email in 1~3 business day

GB/T 6618-2009 is referred in:

*GB/T 1558-2009 Test method for substitutional atomic carbon concent of silicon by infrared absorption

Standard

GB/T 6618-2009 Test method for thickness and total thickness variation of silicon slices (English Version)
Standard No.	GB/T 6618-2009
Status	valid
Language	English
File Format	PDF
Word Count	6000 words
Price(USD)	180.0
Implemented on	2010-6-1
Delivery	via email in 1~3 business day

Detail of GB/T 6618-2009

Standard No.

English Name

Chinese Name

Chinese Classification

Professional Classification

ICS Classification

Issued by

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Implemented on

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Superseded on

Abolished on

Superseding

Language

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Price(USD)

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Introduction of GB/T 6618-2009

本标准规定了硅单晶切割片、研磨片、抛光片和外延片(简称硅片)厚度和总厚度变化的分立式和扫
描式测量方法。
本标准适用于符合GB/T12964、GB/T12965、GB/T14139规定的尺寸的硅片的厚度和总厚度变
化的测量。在测试仪器允许的情况下,本标准也可用于其他规格硅片的厚度和总厚度变化的测量。

Contents of GB/T 6618-2009

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Keywords:
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